Patents
45 Patents

8,349,241 Method to arrange features on a substrate to replicate features having minimal dimensional variability
8,318,066 Step and repeat imprint lithography process
8,076,386  Materials for imprint lithography  
8,066,930  Forming a layer on a substrate  
7,981,481 Method for controlling distribution of fluid components on a body  
7,943,081  Step and repeat imprint lithography processes
7,939,131  Method to provide a layer with uniform etch characteristics
7,906,180  Composition for an etching mask comprising a silicon-containing material
7,906,058  Bifurcated contact printing technique
7,845,931  Polymerization technique to attenuate oxygen inhibition of solidification of liquids and composition therefor
7,727,453  Step and repeat imprint lithography processes
7,7442,33  Capillary imprinting technique
7,338,275  Formation of discontinuous films during an imprint lithography process
7,281,921   Scatterometry alignment for imprint lithography
7,279,113   Method of forming a compliant template for UV imprinting
7,252,715   System for dispensing liquids
7,224,443   Imprint lithography substrate processing tool for modulating shapes of substrates
7,157,036   Method to reduce adhesion between a conformable region and a pattern of a mold
7,140,861   Compliant hard template for UV imprinting
7,122,482  Methods for fabricating patterned features utilizing imprint lithography
7,122,079   Composition for an etching mask comprising a silicon-containing material
7,090,716   Single phase fluid imprint lithography method
7,077,992   Step and repeat imprint lithography processes
7,071,088   Method for fabricating bulbous-shaped vias
7,070,405   Alignment systems for imprint lithography
7,027,156   Scatterometry alignment for imprint lithography
7,019,835   Method and system to measure characteristics of a film disposed on a substrate
7,019,819   Chucking system for modulating shapes of substrates
6,982,783   Chucking system for modulating shapes of substrates
6,980,282   Method for modulating shapes of substrates
6,936,194  Functional patterning material for imprint lithography processes”
6,932,934  Formation of discontinuous films during an imprint lithography process”
6,926,929  System and method for dispensing liquids
6,916,584  Alignment methods for imprint lithography
6,900,881  Step and repeat imprint lithography systems
6,408,260   Laser lithography quality alarm system
6,344,860   Methods and apparatus for a stereoscopic graphic user interface
5,966,212  High-speed, high-resolution, large area inspection using multiple optical fourier transform cells
5,656,942   Prober and tester with contact interface for integrated circuits containing wafer held docked in a vertical plane”
5,966,212   High Speed, High Resolution, Large Area Inspection using Multiple Optical Fourier Transform Cells
5,506,676   Defect Detection using Fourier Optics and a Spatial Separator for Simultaneous Optical Computing
4,857,738   Absorbtion measurements of materials
4,874,240   Characterization of semiconductor resist materials
4,362,809   Multilayer photoresist utilizing  an absorbent dye
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